Novel humidity sensors based on nanoscale hybrid dielectric materials

A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.