A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.
|Number of pages||4|
|Journal||Electrochemical Society Interface|
|State||Published - 2017|
Bibliographical noteFunding Information:
The author is grateful to his graduate and postdoctoral students in assistance in experiments, including Ibrahim Yucedag, Mengmei Liu, Riasad Badhan, and Bojie Chen. He is thankful to engineers of Advanced Semiconductor Processing Technology (ASPT) in both USA and China in assistance in research and development of the dew point sensor product, including Lei Han, Neha Nehru, Jingbo Tong, Fangdong Huang, Yunju Huo, and Tian Huang. He is also thankful to financial support from Kentucky Science and Engineering Foundation, USA, Chengdu High-Tech Zone Entrepreneur Award, and Chengdu City Talent Program, Chengdu, Sichuan, China.
© The Electrochemical Society.
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