Novel humidity sensors based on nanoscale hybrid dielectric materials

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1 Scopus citations


A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.

Original languageEnglish
Pages (from-to)67-70
Number of pages4
JournalElectrochemical Society Interface
Issue number4
StatePublished - 2017

Bibliographical note

Publisher Copyright:
© The Electrochemical Society.

ASJC Scopus subject areas

  • Electrochemistry


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