Abstract
A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.
Original language | English |
---|---|
Pages (from-to) | 67-70 |
Number of pages | 4 |
Journal | Electrochemical Society Interface |
Volume | 26 |
Issue number | 4 |
DOIs | |
State | Published - 2017 |
Bibliographical note
Publisher Copyright:© The Electrochemical Society.
ASJC Scopus subject areas
- Electrochemistry