Novel humidity sensors based on nanoscale hybrid dielectric materials

Zhi David Chen

doi:10.1149/2.F07174if

Novel humidity sensors based on nanoscale hybrid dielectric materials

Zhi David Chen

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.

Original language	English
Pages (from-to)	67-70
Number of pages	4
Journal	Electrochemical Society Interface
Volume	26
Issue number	4
DOIs	https://doi.org/10.1149/2.F07174if
State	Published - 2017

Bibliographical note

Funding Information:
The author is grateful to his graduate and postdoctoral students in assistance in experiments, including Ibrahim Yucedag, Mengmei Liu, Riasad Badhan, and Bojie Chen. He is thankful to engineers of Advanced Semiconductor Processing Technology (ASPT) in both USA and China in assistance in research and development of the dew point sensor product, including Lei Han, Neha Nehru, Jingbo Tong, Fangdong Huang, Yunju Huo, and Tian Huang. He is also thankful to financial support from Kentucky Science and Engineering Foundation, USA, Chengdu High-Tech Zone Entrepreneur Award, and Chengdu City Talent Program, Chengdu, Sichuan, China.

Publisher Copyright:
© The Electrochemical Society.

ASJC Scopus subject areas

Electrochemistry

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10.1149/2.F07174if

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title = "Novel humidity sensors based on nanoscale hybrid dielectric materials",

abstract = "A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.",

author = "Chen, {Zhi David}",

note = "Funding Information: The author is grateful to his graduate and postdoctoral students in assistance in experiments, including Ibrahim Yucedag, Mengmei Liu, Riasad Badhan, and Bojie Chen. He is thankful to engineers of Advanced Semiconductor Processing Technology (ASPT) in both USA and China in assistance in research and development of the dew point sensor product, including Lei Han, Neha Nehru, Jingbo Tong, Fangdong Huang, Yunju Huo, and Tian Huang. He is also thankful to financial support from Kentucky Science and Engineering Foundation, USA, Chengdu High-Tech Zone Entrepreneur Award, and Chengdu City Talent Program, Chengdu, Sichuan, China. Publisher Copyright: {\textcopyright} The Electrochemical Society.",

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language = "English",

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PY - 2017

Y1 - 2017

N2 - A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.

AB - A novel α-alumina(sapphire)/silicon dioxide humidity sensor using the hybrid dielectric material technique has been described. The hybrid dielectric material consists of an insulating porous dielectric material and a nanoscale humidity-sensing film deposited conformally on the inner surfaces of the pores using atomic layer deposition. These sensors exhibit long-term stability, fast response, and durability at extremely high/low humidity levels.

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Novel humidity sensors based on nanoscale hybrid dielectric materials

Abstract

Bibliographical note

ASJC Scopus subject areas

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