Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

P. D. Keathley, J. T. Hastings

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The optical properties of sputtered fluorinated ethylene propylene (FEP) thin films (100-400 nm) were analyzed using spectroscopic ellipsometry. Glass (similar to BK7) and silicon substrates were used, and deposition rates on glass were found to be on average 37% higher than on silicon. Refractive indices of the deposited films at 630 nm ranged from 1.379 to 1.392 on glass and from 1.381 to 1.417 on Si, which roughly corresponds to a 4.3% increase when compared to the bulk material value of 1.335. By using the optical properties of the deposited FEP films, it was shown through modeling that they present a possible alternative when fabricating dual-mode surface-plasmon resonance sensors that can differentiate bulk and surface refractive index changes.

Original languageEnglish
Pages (from-to)2473-2477
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume26
Issue number6
DOIs
StatePublished - 2008

Bibliographical note

Funding Information:
This material is based upon work supported by the National Science Foundation under Grant No. 0601351. Facilities and technical assistance for this work were provided by the University of Kentucky Center for Nanoscale Science and Engineering (CeNSE) which is supported by National Science Foundation EPSCoR Grant No. 0447479. The authors thank C. May and B. Wajdyk for valuable technical assistance.

Funding

This material is based upon work supported by the National Science Foundation under Grant No. 0601351. Facilities and technical assistance for this work were provided by the University of Kentucky Center for Nanoscale Science and Engineering (CeNSE) which is supported by National Science Foundation EPSCoR Grant No. 0447479. The authors thank C. May and B. Wajdyk for valuable technical assistance.

FundersFunder number
CeNSE
National Science Foundation/EPSCoR0447479
National Science Foundation (NSF)0601351
University of Kentucky

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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