The optical properties of sputtered fluorinated ethylene propylene (FEP) thin films (100-400 nm) were analyzed using spectroscopic ellipsometry. Glass (similar to BK7) and silicon substrates were used, and deposition rates on glass were found to be on average 37% higher than on silicon. Refractive indices of the deposited films at 630 nm ranged from 1.379 to 1.392 on glass and from 1.381 to 1.417 on Si, which roughly corresponds to a 4.3% increase when compared to the bulk material value of 1.335. By using the optical properties of the deposited FEP films, it was shown through modeling that they present a possible alternative when fabricating dual-mode surface-plasmon resonance sensors that can differentiate bulk and surface refractive index changes.
|Number of pages
|Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
|Published - 2008
Bibliographical noteFunding Information:
This material is based upon work supported by the National Science Foundation under Grant No. 0601351. Facilities and technical assistance for this work were provided by the University of Kentucky Center for Nanoscale Science and Engineering (CeNSE) which is supported by National Science Foundation EPSCoR Grant No. 0447479. The authors thank C. May and B. Wajdyk for valuable technical assistance.
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering