Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography

J. T. Hastings; Michael H. Lim; J. G. Goodberlet; Henry I. Smith

doi:10.1116/1.1521744

Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography

J. T. Hastings, Michael H. Lim, J. G. Goodberlet, Henry I. Smith

Research output: Contribution to journal › Article › peer-review

74 Scopus citations

Abstract

Grating-based devices were fabricated in a single lithography step by placing Bragg gratings in the sidewalls of integrated waveguides. In particular, apodized sidewall gratings were fabricated in silicon-on- insulator rib waveguides with grating strengths and apodization profiles suitable for WDM channel add/drop filters.

Original language	English
Pages (from-to)	2753-2757
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1521744
State	Published - Nov 2002

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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title = "Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography",

abstract = "Grating-based devices were fabricated in a single lithography step by placing Bragg gratings in the sidewalls of integrated waveguides. In particular, apodized sidewall gratings were fabricated in silicon-on- insulator rib waveguides with grating strengths and apodization profiles suitable for WDM channel add/drop filters.",

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AU - Goodberlet, J. G.

AU - Smith, Henry I.

PY - 2002/11

Y1 - 2002/11

N2 - Grating-based devices were fabricated in a single lithography step by placing Bragg gratings in the sidewalls of integrated waveguides. In particular, apodized sidewall gratings were fabricated in silicon-on- insulator rib waveguides with grating strengths and apodization profiles suitable for WDM channel add/drop filters.

AB - Grating-based devices were fabricated in a single lithography step by placing Bragg gratings in the sidewalls of integrated waveguides. In particular, apodized sidewall gratings were fabricated in silicon-on- insulator rib waveguides with grating strengths and apodization profiles suitable for WDM channel add/drop filters.

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M3 - Article

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SN - 0734-211X

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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ER -

Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography

Abstract

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