Grating-based devices were fabricated in a single lithography step by placing Bragg gratings in the sidewalls of integrated waveguides. In particular, apodized sidewall gratings were fabricated in silicon-on- insulator rib waveguides with grating strengths and apodization profiles suitable for WDM channel add/drop filters.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Nov 2002|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering