Parallel boron nitride nanoribbons and etch tracks formed through catalytic etching

Armin Ansary, Mohsen Nasseri, Mathias J. Boland, Douglas R. Strachan

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


One-dimensional (1D) catalytic etching was investigated in few-layer hexagonal boron nitride (hBN) films. Etching of hBN was shown to share a number of similarities with that of graphitic films. As in graphitic films, etch tracks in hBN commenced at film edges and occurred predominantly along certain crystal directions of its lattice, though it was shown that the tracks were generally narrower than those of few-layer graphene under similar processing conditions. It was also shown that catalytic hydrogenation can occur completely through a few-layer hBN film, demonstrating that this process can be used in the formation of isolated low-dimensional nanoscale structures from other layered 2D materials beyond graphene. This ability for thin hBN films to be etched completely through allowed for a crystalline substrate to guide the etching process, which was demonstrated with the successful etch track formation of few-layer hBN on single-crystalline sapphire substrates. The substrate-guided etching resulted in parallel few-layer hBN nanoribbons having an average width of 32 nm and spacing of 13 nm.

Original languageEnglish
Pages (from-to)4874-4882
Number of pages9
JournalNano Research
Issue number9
StatePublished - Sep 1 2018

Bibliographical note

Publisher Copyright:
© 2018, Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature.


  • etch tracks
  • hexagonal boron nitride (hBN)
  • hydrogenation
  • nanoribbons
  • one-dimensional catalytic etching

ASJC Scopus subject areas

  • General Materials Science
  • Electrical and Electronic Engineering


Dive into the research topics of 'Parallel boron nitride nanoribbons and etch tracks formed through catalytic etching'. Together they form a unique fingerprint.

Cite this