TY - GEN
T1 - Parylene-based electrochemical-MEMS force sensor array for assessing neural probe insertion mechanics
AU - Kim, Brian J.
AU - Gutierrez, Christian A.
AU - Gerhardt, Greg A.
AU - Meng, Ellis
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - We present the first use of a Parylene-based electrochemical-MEMS (EC-MEMS) sensor array for instrumentation of ceramic-based neural electrode probes. The sensor array consists of a liquid-filled Parylene-based microchannel and an array of enclosed electrodes that monitor local variations in impedance during mechanical deformation of the channel. The array provides real time measurement of out-of-plane interfacial forces produced directly on the electrode shank surface (<5 mm 2) during insertion of the probe. We demonstrate the ability to examine the relative force distribution of interfacial forces produced on the shank surface during insertion, thereby providing a clearer understanding of probe insertion mechanics. Our approach enables, for the first time, robust mechanical instrumentation of electrode shanks providing a means for assessing the poorly understood interfacial mechanics between neural probes and tissue.
AB - We present the first use of a Parylene-based electrochemical-MEMS (EC-MEMS) sensor array for instrumentation of ceramic-based neural electrode probes. The sensor array consists of a liquid-filled Parylene-based microchannel and an array of enclosed electrodes that monitor local variations in impedance during mechanical deformation of the channel. The array provides real time measurement of out-of-plane interfacial forces produced directly on the electrode shank surface (<5 mm 2) during insertion of the probe. We demonstrate the ability to examine the relative force distribution of interfacial forces produced on the shank surface during insertion, thereby providing a clearer understanding of probe insertion mechanics. Our approach enables, for the first time, robust mechanical instrumentation of electrode shanks providing a means for assessing the poorly understood interfacial mechanics between neural probes and tissue.
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U2 - 10.1109/MEMSYS.2012.6170109
DO - 10.1109/MEMSYS.2012.6170109
M3 - Conference contribution
AN - SCOPUS:84860493554
SN - 9781467303248
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 124
EP - 127
BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Y2 - 29 January 2012 through 2 February 2012
ER -