Parylene-based electrochemical-MEMS force sensor array for assessing neural probe insertion mechanics

Brian J. Kim, Christian A. Gutierrez, Greg A. Gerhardt, Ellis Meng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Abstract

We present the first use of a Parylene-based electrochemical-MEMS (EC-MEMS) sensor array for instrumentation of ceramic-based neural electrode probes. The sensor array consists of a liquid-filled Parylene-based microchannel and an array of enclosed electrodes that monitor local variations in impedance during mechanical deformation of the channel. The array provides real time measurement of out-of-plane interfacial forces produced directly on the electrode shank surface (<5 mm 2) during insertion of the probe. We demonstrate the ability to examine the relative force distribution of interfacial forces produced on the shank surface during insertion, thereby providing a clearer understanding of probe insertion mechanics. Our approach enables, for the first time, robust mechanical instrumentation of electrode shanks providing a means for assessing the poorly understood interfacial mechanics between neural probes and tissue.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages124-127
Number of pages4
DOIs
StatePublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: Jan 29 2012Feb 2 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period1/29/122/2/12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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