Polarization induced high Al composition AlGaN p-n junction grown on silicon substrates

Peng Zhang, Shi Bin Li, Hong Ping Yu, Zhi Ming Wu, Zhi Chen, Ya Dong Jiang

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2 Scopus citations

Abstract

Wide bandgap AlxGa1-xN (x = 0.7-1) p-n junction is realized on a silicon substrate through polarization induced doping. Polarization induced positive charge field is produced by linearly grading from AlN to Al0.7Ga0.3N, and negative charge field is generated by an inverted grading from Al0.7Ga0.3N to AlN. The polarization charge field induced hole density is on the order of 1018 cm-3 in the graded AlxGa1-xN:Be (x = 0.7-1) p-n junction. Polarization doping provides a feasible way to mass produce III-nitride devices on silicon substrates.

Original languageEnglish
Article number118102
JournalChinese Physics Letters
Volume31
Issue number11
DOIs
StatePublished - Nov 1 2014

Bibliographical note

Publisher Copyright:
© 2014 Chinese Physical Society and IOP Publishing Ltd.

ASJC Scopus subject areas

  • Physics and Astronomy (all)

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