Abstract
The response of hydrogen sensor based on nanoporous palladium (Pd) supported by robust anodic aluminum oxide (AAO) substrate was enhanced by pore-widening treatment using phosphoric acid (H3PO4) as etching solution. It is demonstrated that different concentration of H3PO4 and different pore-widening time lead to different pore-diameters of AAO resulting in different performance of hydrogen sensor. The optimized hydrogen sensor shows a fast response time of 19s at H2 concentration of 1% and a wide detection range of H2 concentration from 0.1% to 2% by pore-widening treatment with a time of 30 minute in 5%H3PO4 concentration.
Original language | English |
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Title of host publication | 7th IEEE International Nanoelectronics Conference 2016, INEC 2016 |
ISBN (Electronic) | 9781467389693 |
DOIs | |
State | Published - Oct 12 2016 |
Event | 7th IEEE International Nanoelectronics Conference, INEC 2016 - Chengdu, China Duration: May 9 2016 → May 11 2016 |
Publication series
Name | Proceedings - International NanoElectronics Conference, INEC |
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Volume | 2016-October |
ISSN (Print) | 2159-3523 |
Conference
Conference | 7th IEEE International Nanoelectronics Conference, INEC 2016 |
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Country/Territory | China |
City | Chengdu |
Period | 5/9/16 → 5/11/16 |
Bibliographical note
Publisher Copyright:© 2016 IEEE.
Keywords
- HPO
- anodic aluminum oxide (AAO)
- hydrogen sensor
- pore-widening
ASJC Scopus subject areas
- Electrical and Electronic Engineering