Pore-widening treatment-enhanced hydrogen sensing with nanoporous palladium films

Han Zhou, Shuanghong Wu, Mengmeng Hao, Minghui Sun, Xiongbang Wei, Shibin Li, Zhi Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


The response of hydrogen sensor based on nanoporous palladium (Pd) supported by robust anodic aluminum oxide (AAO) substrate was enhanced by pore-widening treatment using phosphoric acid (H3PO4) as etching solution. It is demonstrated that different concentration of H3PO4 and different pore-widening time lead to different pore-diameters of AAO resulting in different performance of hydrogen sensor. The optimized hydrogen sensor shows a fast response time of 19s at H2 concentration of 1% and a wide detection range of H2 concentration from 0.1% to 2% by pore-widening treatment with a time of 30 minute in 5%H3PO4 concentration.

Original languageEnglish
Title of host publication7th IEEE International Nanoelectronics Conference 2016, INEC 2016
ISBN (Electronic)9781467389693
StatePublished - Oct 12 2016
Event7th IEEE International Nanoelectronics Conference, INEC 2016 - Chengdu, China
Duration: May 9 2016May 11 2016

Publication series

NameProceedings - International NanoElectronics Conference, INEC
ISSN (Print)2159-3523


Conference7th IEEE International Nanoelectronics Conference, INEC 2016

Bibliographical note

Publisher Copyright:
© 2016 IEEE.


  • HPO
  • anodic aluminum oxide (AAO)
  • hydrogen sensor
  • pore-widening

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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