Preparation of indium tin oxide films by vacuum evaporation

Zhi Chen, Kaiyu Yang, Jianqqu Wang

Research output: Contribution to journalArticlepeer-review

22 Scopus citations


High quality indium tin oxide (ITO) films were deposited onto Pyrex glass substrates by vacuum evaporation from an evaporation boat closed by an apertured cover. A film of 6.2 Ω/{right angle, 90 degree} sheet resistance and 90% average transmittance in the visible region of the spectrum has been prepared. At a film thickness of 1150 Å the resistivity reached 7.13 × 10-5 Ω cm. The effect of the deposition parameters on the electrical and optical properties of the films has been studied. We found that (1) the temperature of the evaporation boat strongly influenced the transmittance of the ITO films, (2) the aperture of the evaporation boat also influenced the properties of the films strongly and (3) the oxygen pressure admitted into the chamber should not bee too low. In addition, the effect of the aperture of the boat on the non-stoichiometry in ITO films has been studied by electron spectroscopy for chemical analysis and the impurities in the ITO films have been probed by Auger electron spectroscopy.

Original languageEnglish
Pages (from-to)305-313
Number of pages9
JournalThin Solid Films
Issue numberC
StatePublished - Aug 1988

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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