Properties of Modified Anodic‐Spark‐Deposited Alumina Porous Ceramic Films as Humidity Sensors

Zhi Chen, Mao‐Chang ‐C Jin, Chao Zhen, Guan‐Hua ‐H Chen

Research output: Contribution to journalArticlepeer-review

16 Scopus citations


α‐Alumina films formed by anodic spark deposition in the melt of NaHSO4‐KHSO4 mixture (200°C) exhibited a porous structure. It has been found that the porosity and amount of α‐phase varied with anodic current density. By electrical measurements, films were found to exhibit a continuous open‐pore structure, causing failure of humidity sensors. This problem can be overcome by reanodization of the anodicspark‐deposited alumina films in either borax aqueous solution or sulfuric acid solution for a short time to form an effective barrier layer at the pore base. The modified anodic‐spark‐deposited alumina films showed highly sensitive response to water vapor change in the range of −76° to +20°C dew point with much improved long‐term stability. The humidity characteristics of the α‐alumina films were qualitatively explained in terms of the BET theory and condensation theory.

Original languageEnglish
Pages (from-to)1325-1330
Number of pages6
JournalJournal of the American Ceramic Society
Issue number6
StatePublished - Jun 1991


  • alumina
  • anodes
  • electrical properties
  • films
  • humidity

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry


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