Reduction of Epitaxial MoO2 to Mo by High-temperature Hydrogen Annealing

Joonhyuck Lee, Hyun Jung Kim, Eunyoung Ahn, Jaekwang Lee, Ambrose Seo, Hyoungjeen Jeen

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


The molybdenum oxide (MoO2) reduction process using hydrogen gas at elevated temperatures is commonly used to purify Mo metal. We report a methodology to reduce epitaxial MoO2 films using diluted hydrogen gas comprising 3% hydrogen and 97% argon. Under the reaction temperature that is similar to the reduction process of bulk MoO2, it is remarkable that oxygen-free epitaxial Mo metal films are created according to structural characterizations and spectroscopic studies. The result of this study helps in understanding the reduction process of epitaxial binary oxides.

Original languageEnglish
Pages (from-to)108-112
Number of pages5
JournalNew Physics: Sae Mulli
Issue number2
StatePublished - 2023

Bibliographical note

Publisher Copyright:
© 2023 The Korean Physical Society. All rights reserved.


  • Annealing effect
  • Epitaxial thin films
  • Metals

ASJC Scopus subject areas

  • General Physics and Astronomy


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