The molybdenum oxide (MoO2) reduction process using hydrogen gas at elevated temperatures is commonly used to purify Mo metal. We report a methodology to reduce epitaxial MoO2 films using diluted hydrogen gas comprising 3% hydrogen and 97% argon. Under the reaction temperature that is similar to the reduction process of bulk MoO2, it is remarkable that oxygen-free epitaxial Mo metal films are created according to structural characterizations and spectroscopic studies. The result of this study helps in understanding the reduction process of epitaxial binary oxides.
|Number of pages||5|
|Journal||New Physics: Sae Mulli|
|State||Published - 2023|
Bibliographical notePublisher Copyright:
© 2023 The Korean Physical Society. All rights reserved.
- Annealing effect
- Epitaxial thin films
ASJC Scopus subject areas
- Physics and Astronomy (all)