Reduction of gate leakage current of HfSiON dielectrics through enhanced phonon-energy coupling

Chandan B. Samantaray, Zhi Chen

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Fingerprint

Dive into the research topics of 'Reduction of gate leakage current of HfSiON dielectrics through enhanced phonon-energy coupling'. Together they form a unique fingerprint.

Engineering

Material Science