Room-temperature and fast response hydrogen sensor based on annealed nanoporous palladium film

Mengmeng Hao, Shuanghong Wu, Han Zhou, Wenbin Ye, Xiongbang Wei, Xiangru Wang, Zhi Chen, Shibin Li

Research output: Contribution to journalArticlepeer-review

20 Scopus citations


Hydrogen sensor based on nanoporous palladium film with a short response time at room temperature has been investigated. Nanoporous palladium film was deposited on treated porous anodic aluminum oxide template by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensor depending on different post-deposition annealing temperatures ranging from 150 to 400 °C. In this sensor, we obtained a sensor response time as short as 30 s at 1 % hydrogen concentration with an anneal temperature of 200 °C. The sensor exhibited good performance under hydrogen concentrations from 0.1 to 1 %.

Original languageEnglish
Pages (from-to)2420-2426
Number of pages7
JournalJournal of Materials Science
Issue number5
StatePublished - Mar 1 2016

Bibliographical note

Funding Information:
This work was supported by the National Natural Science Foundation of China (Grant Nos. 61405026, 61371046, 61474016 and 61421002), National Higher-education Institution General Research and Development Funding (Grant No. ZYGX2014J049), and China Postdoctoral Science Foundation (Grant No. 2014M552330).

Publisher Copyright:
© 2015, Springer Science+Business Media New York.

ASJC Scopus subject areas

  • Materials Science (all)
  • Mechanics of Materials
  • Mechanical Engineering


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