Hydrogen sensor based on nanoporous palladium film with a short response time at room temperature has been investigated. Nanoporous palladium film was deposited on treated porous anodic aluminum oxide template by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensor depending on different post-deposition annealing temperatures ranging from 150 to 400 °C. In this sensor, we obtained a sensor response time as short as 30 s at 1 % hydrogen concentration with an anneal temperature of 200 °C. The sensor exhibited good performance under hydrogen concentrations from 0.1 to 1 %.
|Number of pages||7|
|Journal||Journal of Materials Science|
|State||Published - Mar 1 2016|
Bibliographical noteFunding Information:
This work was supported by the National Natural Science Foundation of China (Grant Nos. 61405026, 61371046, 61474016 and 61421002), National Higher-education Institution General Research and Development Funding (Grant No. ZYGX2014J049), and China Postdoctoral Science Foundation (Grant No. 2014M552330).
© 2015, Springer Science+Business Media New York.
ASJC Scopus subject areas
- Materials Science (all)
- Mechanics of Materials
- Mechanical Engineering