Self-assembled monolayer fiducial grids for spatial-phase-locked electron-beam lithography

C. B. Samantaray, J. T. Hastings

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Self-assembled monolayer fiducial grids for spatial-phase-locked electron-beam lithography'. Together they form a unique fingerprint.

Engineering

Earth and Planetary Sciences