Si 3N 4 on GaAs by direct electron cyclotron resonance plasma assisted nitridation of Si layer in Si/GaAs structure

  • D. M. Diatezua
  • , Z. Wang
  • , D. Park
  • , Z. Chen
  • , A. Rockett
  • , H. Morkoc

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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