Silver patterning using an atomic force microscope tip and laser-induced chemical deposition from liquids

Carlos A. Jarro, Eugenii U. Donev, Mostafa Pinar Menguç, Jeffrey Todd Hastings

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

This article presents a new direct patterning technique in which laser photoreduction of silver from a liquid is controlled by a scanning atomic force microscope tip. Contrary to expectations, the tip suppresses, rather than enhances, deposition on the underlying substrate, and this suppression persists in the absence of the tip. Experiments presented here exclude three potential mechanisms: purely mechanical material removal, depletion of the silver precursor, and preferential photoreduction on existing deposits. These results represent a first step toward direct, negative tone, tip-based patterning of functional materials.

Original languageEnglish
Article number06FD02
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume30
Issue number6
DOIs
StatePublished - Nov 2012

Bibliographical note

Funding Information:
The authors thank Greg Schardein for taking the EDS spectra and Gazi M. Huda for his valuable comments and suggestions. Experiments described here were conducted in part in the Center for Nanoscale Science and Engineering (infrastructure established under NSF Grant No. EPS-0447479) and Electron Microscopy Center at the University of Kentucky. This work was supported by the National Science Foundation under Grant No. CMMI-0800658.

Funding

The authors thank Greg Schardein for taking the EDS spectra and Gazi M. Huda for his valuable comments and suggestions. Experiments described here were conducted in part in the Center for Nanoscale Science and Engineering (infrastructure established under NSF Grant No. EPS-0447479) and Electron Microscopy Center at the University of Kentucky. This work was supported by the National Science Foundation under Grant No. CMMI-0800658.

FundersFunder number
UK Center for Nanoscale Science and Engineering
National Science Foundation (NSF)EPS-0447479, 0800658, CMMI-0800658

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Instrumentation
    • Process Chemistry and Technology
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering
    • Materials Chemistry

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