Abstract
A new organic sol-gel spin-coating method was adopted to prepare the vanadium oxide (VOx) thin films. In this method, the sol-gel adopted was formed from the dispersion consisted of different proportions of V2O 5 powder, benzyl alcohol and iso-butanol. Spin-coating technology and thermal-resistance properties of the VOx thin films were systematically investigated. In this method, V5+ in the solution was reduced to form the V4+ isobutanol complex. Compared with conventional inorganic sol-gel process, little hydrolysis happened and little precipitation was produced, and temperature for the post-heating treatment is relatively low. Compared with conventional organic sol-gel process, the raw materials used in this method have relatively low prices.
Original language | English |
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Pages (from-to) | 126-132 |
Number of pages | 7 |
Journal | Integrated Ferroelectrics |
Volume | 153 |
Issue number | 1 |
DOIs | |
State | Published - May 4 2014 |
Bibliographical note
Funding Information:This work was supported as National Natural Science Foundation of China Nos. 61101030 and National Higher-education Institution General Research and Development Funding Nos. ZYGX2013J063.
Keywords
- Vanadium oxide thin films
- sol-gel spin-coating
- thermal-resistance properties
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry