The Performance of Flexible Capacitive Pressure Sensor with Microstructured PDMS Films

Yong Quan, Xiongbang Wei, Lun Xiao, Tao Wu, Hanying Pang, Shuanghong Wu, Zhi Chen, Yadong Jiang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


The sandwich structure flexible capacitive pressure sensor was designed. The sensor adopted polydimethylsiloxane (PDMS) as flexible substrate, silver nanowires as the electrode material, and PDMS as dielectric layer, in addition, the substrate was made by two kinds of structures, the obscured glass substrate with micro-nano structured surface and the smooth glass substrate without micro-nano structured surface, as effective moulds for construction of flexible PDMS thin films. We laminated the two AgNWs/PDMS films together, face-to-face, with another PDMS as dielectric layer, to obtain the capacitive strain sensor, and then study the influence of micro-nano structure on the sensor sensitivity. And the sensitivity of micro-structured AgNWs/PDMS composite sensor was about 1.0 kPa-1, while the sensitivity of flat structured sensor was about 0.6 kPa-1. Research has shown that micro-nano structured electrode can effectively improve the sensitivity of the device.

Original languageEnglish
Pages (from-to)337-340
Number of pages4
JournalChinese Journal of Sensors and Actuators
Issue number3
StatePublished - Mar 1 2017

Bibliographical note

Publisher Copyright:
© 2017, The Editorial Office of Chinese Journal of Sensors and Actuators. All right reserved.


  • Flexible pressure sensor
  • Micro-nano structure
  • Polydimethylsiloxane (PDMS)
  • Silver nanowires

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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