Thermal surface treatment using intense, pulsed ion beams

R. W. Stinnett, R. G. Buchheit, F. A. Greulich, C. R. Hills, A. C. Kilgo, D. C. McIntyre, J. B. Greenly, M. O. Thompson, G. P. Johnston, D. J. Rej

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

36 Scopus citations

Abstract

Surface treatment experiments using intense pulsed ion beams have demonstrated new capabilities for materials surface treatment. These experiments have confirmed corrosion resistance, surface hardening, amorphous layer and nanocrystalline grain size formation, metal surface polishing, controlled melt of ceramic surfaces, surface cleaning and oxide layer removal by rapid melting and resolidification. Deposition of beam energy in a thin surface layer allows melting of the layer with relatively small energies (1-10 J/cm2) and allows rapid cooling (109-1010 K/sec) and resolidification of the melted layer by thermal diffusion into the underlying substrate. At higher intensities (≥20 J/cm2), this technology can provide rapid ablation of material from targets followed by rapid, congruent deposition of polycrystalline thin films on substrates. This technology uses high energy pulsed (40-400 ns) ion beams to directly deposit energy in the top 2-20 micrometers of the surface of materials.

Original languageEnglish
Title of host publicationMaterials Synthesis and Processing Using Ion Beams
EditorsAnthony F. Garito, Alex K-Y. Jen, Charles Y-C. Lee, Larry R. Dalton
Pages521-532
Number of pages12
StatePublished - 1994
EventProceedings of the MRS 1993 Fall Meeting - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Publication series

NameMaterials Research Society Symposium Proceedings
Volume316
ISSN (Print)0272-9172

Conference

ConferenceProceedings of the MRS 1993 Fall Meeting
CityBoston, MA, USA
Period11/29/9312/3/93

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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