Towards real-time methane (CH4) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators

Zenghui Wang; Peng Wang; Jaesung Lee; Chung Chiun Liu; Philip X.L. Feng

doi:10.1109/TRANSDUCERS.2015.7180953

Towards real-time methane (CH₄) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators

Zenghui Wang, Peng Wang, Jaesung Lee, Chung Chiun Liu, Philip X.L. Feng

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This digest paper describes the initial efforts on real-time methane (CH₄) capture and detection, by using silicon carbide (SiC) resonant microelectromechanical systems (MEMS) coated with SnO₂ nanoparticles (NPs). The coating greatly boosts the active adsorption area, toward enhancing the capture. SiC tethered square trampoline devices coated with ultrathin SnO₂ layers exhibit robust resonances in both vacuum and air, featuring large capturing area. Closed-loop oscillators with embedded SiC resonators enable fast, real-time readout of device responses upon exposure to CH₄. An established electrochemical sensor is employed to verify the signature of CH₄. SiC trampoline resonators are tested upon controlled CH₄ flux in vacuum, and in atmospheric pressure with N₂ carrier, demonstrating clear responses to CH₄.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Pages	432-435
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7180953
State	Published - Aug 5 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	6/21/15 → 6/25/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

MEMS
gas sensing
methane (CH) capture and detection
nanoparticle (NP)
oscillator
resonator
silicon carbide (SiC)
surface adsorption
tin dioxide (SnO)

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2015.7180953

Cite this

Wang, Z., Wang, P., Lee, J., Liu, C. C., & Feng, P. X. L. (2015). Towards real-time methane (CH₄) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 432-435). Article 7180953 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). https://doi.org/10.1109/TRANSDUCERS.2015.7180953

Wang, Zenghui ; Wang, Peng ; Lee, Jaesung et al. / Towards real-time methane (CH₄) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. 2015. pp. 432-435 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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title = "Towards real-time methane (CH4) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators",

abstract = "This digest paper describes the initial efforts on real-time methane (CH4) capture and detection, by using silicon carbide (SiC) resonant microelectromechanical systems (MEMS) coated with SnO2 nanoparticles (NPs). The coating greatly boosts the active adsorption area, toward enhancing the capture. SiC tethered square trampoline devices coated with ultrathin SnO2 layers exhibit robust resonances in both vacuum and air, featuring large capturing area. Closed-loop oscillators with embedded SiC resonators enable fast, real-time readout of device responses upon exposure to CH4. An established electrochemical sensor is employed to verify the signature of CH4. SiC trampoline resonators are tested upon controlled CH4 flux in vacuum, and in atmospheric pressure with N2 carrier, demonstrating clear responses to CH4.",

keywords = "MEMS, gas sensing, methane (CH) capture and detection, nanoparticle (NP), oscillator, resonator, silicon carbide (SiC), surface adsorption, tin dioxide (SnO)",

author = "Zenghui Wang and Peng Wang and Jaesung Lee and Liu, \{Chung Chiun\} and Feng, \{Philip X.L.\}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",

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Wang, Z, Wang, P, Lee, J, Liu, CC & Feng, PXL 2015, Towards real-time methane (CH₄) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7180953, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp. 432-435, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7180953

Towards real-time methane (CH₄) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators. / Wang, Zenghui; Wang, Peng; Lee, Jaesung et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. 2015. p. 432-435 7180953 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This digest paper describes the initial efforts on real-time methane (CH4) capture and detection, by using silicon carbide (SiC) resonant microelectromechanical systems (MEMS) coated with SnO2 nanoparticles (NPs). The coating greatly boosts the active adsorption area, toward enhancing the capture. SiC tethered square trampoline devices coated with ultrathin SnO2 layers exhibit robust resonances in both vacuum and air, featuring large capturing area. Closed-loop oscillators with embedded SiC resonators enable fast, real-time readout of device responses upon exposure to CH4. An established electrochemical sensor is employed to verify the signature of CH4. SiC trampoline resonators are tested upon controlled CH4 flux in vacuum, and in atmospheric pressure with N2 carrier, demonstrating clear responses to CH4.

AB - This digest paper describes the initial efforts on real-time methane (CH4) capture and detection, by using silicon carbide (SiC) resonant microelectromechanical systems (MEMS) coated with SnO2 nanoparticles (NPs). The coating greatly boosts the active adsorption area, toward enhancing the capture. SiC tethered square trampoline devices coated with ultrathin SnO2 layers exhibit robust resonances in both vacuum and air, featuring large capturing area. Closed-loop oscillators with embedded SiC resonators enable fast, real-time readout of device responses upon exposure to CH4. An established electrochemical sensor is employed to verify the signature of CH4. SiC trampoline resonators are tested upon controlled CH4 flux in vacuum, and in atmospheric pressure with N2 carrier, demonstrating clear responses to CH4.

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KW - tin dioxide (SnO)

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Y2 - 21 June 2015 through 25 June 2015

ER -

Wang Z, Wang P, Lee J, Liu CC, Feng PXL. Towards real-time methane (CH₄) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. 2015. p. 432-435. 7180953. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7180953