Two-dimensional MoS2 nanomechanical resonators freelysuspended on microtrenches on flexible substrate

Rui Yang, Zenghui Wang, Peng Wang, Rene Lujan, Tse Nga Ng, Philip X.L. Feng

Research output: Contribution to journalConference articlepeer-review

12 Scopus citations


This digest paper reports on the first high-frequency nanomechanical resonators based on molybdenum disulfide (MoS2) crystalline flakes freely-suspended on microtrenches (∼13μm wide and 14μm deep) fabricated on flexible substrate, with bendability and stretchability. Through investigations of the device resonances via optical excitation and detection by ultrasensitive laser interferometry, we first observe multimode resonances up to ∼50MHz with the polydimethylsiloxane (PDMS) substrate under different bending and stretching conditions. The device resonance frequencies (fres) first increase and then stabilize while quality (Q) factors are enhanced with PDMS trench widening of up to 161% in the region away from the MoS2 flake and 61% at the MoS2 flake edge, without breaking the device. This platform could facilitate investigations of the strain limits in devices, strain-induced bandgap tuning in two-dimensional (2D) crystals, and strain-engineered performance enhancement (e.g., fres, Q, and mobility) in 2D resonators. Furthermore, it is well suited for exploring new 2D flexible and wearable electronic components such as strain gauges and resonant transducers.

Original languageEnglish
Article number7051099
Pages (from-to)877-880
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Issue numberFebruary
StatePublished - Feb 26 2015
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: Jan 18 2015Jan 22 2015

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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