@inproceedings{21fe70d34bf948409f88ab0db1699d24,
title = "Fluence dependence of excimer laser ablation of AIN",
abstract = "Aluminum nitride has been ablated with a KrF excimer laser (248nm) at fluences from 1 to 60 J/cm2. Ablation depth, emission spectra and photothermal beam deflection were detected as a function of fluence.",
author = "Lumpp, \{Janet K.\} and Coretsopoulos, \{Christopher N.\} and Allen, \{Susan D.\}",
year = "1994",
language = "English",
isbn = "1558992227",
series = "Materials Research Society Symposium Proceedings",
pages = "213--218",
editor = "Peter Borgesen and Jensen, \{Klavs F.\} and Pollak, \{Roger A.\}",
booktitle = "Electronic Packaging Materials Science VII",
note = "Proceedings of the Fall 1993 MRS Meeting ; Conference date: 29-11-1993 Through 03-12-1993",
}