TY - GEN
T1 - Growth of horizontally aligned one-dimensional carbon nanotubes array on a Si substrate
AU - Zhang, Hongguo
AU - Chen, Zhi
AU - Li, Tianxiang
AU - Wang, Fengjuan
AU - Saito, Kozo
PY - 2006
Y1 - 2006
N2 - A one-dimensional (1-D) array of carbon nanotubes horizontally aligned on silicon substrates was successfully grown using a flame synthesis method based on the template of a one-dimensional anodic aluminum oxide nanopore array. The diameter and length of nanotubes are controlled by the geometry of nanopores of the aluminum oxide template. This one-dimensional carbon nanotube array may have great potential for fabrication of nanoelectronic devices and nano-electromechanic systems (NEMS) compatible with the planar processing technology.
AB - A one-dimensional (1-D) array of carbon nanotubes horizontally aligned on silicon substrates was successfully grown using a flame synthesis method based on the template of a one-dimensional anodic aluminum oxide nanopore array. The diameter and length of nanotubes are controlled by the geometry of nanopores of the aluminum oxide template. This one-dimensional carbon nanotube array may have great potential for fabrication of nanoelectronic devices and nano-electromechanic systems (NEMS) compatible with the planar processing technology.
UR - https://www.scopus.com/pages/publications/42549113501
UR - https://www.scopus.com/inward/citedby.url?scp=42549113501&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:42549113501
SN - 1424400783
SN - 9781424400782
T3 - 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
SP - 211
EP - 214
BT - 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
T2 - 2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Y2 - 17 June 2006 through 20 June 2006
ER -