Hydrogen-induced silicon wafer splitting

Fuqian Yang

doi:10.1063/1.1586959

Hydrogen-induced silicon wafer splitting

Fuqian Yang

Producción científica: Article › revisión exhaustiva

15 Citas (Scopus)

Resumen

The effect of external stress on hydrogen-induced silicon wafer splitting was studied using the linear elastic theory and thermodynamics. The effect of the formation of molecular hydrogen on the nucleation of microcracks in the hydrogen-implanted region was also investigated. A kinetic theory was formulated to study the growth behavior of the microcrack.

Idioma original	English
Páginas (desde-hasta)	1454-1457
Número de páginas	4
Publicación	Journal of Applied Physics
Volumen	94
N.º	3
DOI	https://doi.org/10.1063/1.1586959
Estado	Published - ago 1 2003

ASJC Scopus subject areas

General Physics and Astronomy

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abstract = "The effect of external stress on hydrogen-induced silicon wafer splitting was studied using the linear elastic theory and thermodynamics. The effect of the formation of molecular hydrogen on the nucleation of microcracks in the hydrogen-implanted region was also investigated. A kinetic theory was formulated to study the growth behavior of the microcrack.",

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AB - The effect of external stress on hydrogen-induced silicon wafer splitting was studied using the linear elastic theory and thermodynamics. The effect of the formation of molecular hydrogen on the nucleation of microcracks in the hydrogen-implanted region was also investigated. A kinetic theory was formulated to study the growth behavior of the microcrack.

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Hydrogen-induced silicon wafer splitting

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