TY - JOUR
T1 - The Performance of Flexible Capacitive Pressure Sensor with Microstructured PDMS Films
AU - Quan, Yong
AU - Wei, Xiongbang
AU - Xiao, Lun
AU - Wu, Tao
AU - Pang, Hanying
AU - Wu, Shuanghong
AU - Chen, Zhi
AU - Jiang, Yadong
N1 - Publisher Copyright:
© 2017, The Editorial Office of Chinese Journal of Sensors and Actuators. All right reserved.
PY - 2017/3/1
Y1 - 2017/3/1
N2 - The sandwich structure flexible capacitive pressure sensor was designed. The sensor adopted polydimethylsiloxane (PDMS) as flexible substrate, silver nanowires as the electrode material, and PDMS as dielectric layer, in addition, the substrate was made by two kinds of structures, the obscured glass substrate with micro-nano structured surface and the smooth glass substrate without micro-nano structured surface, as effective moulds for construction of flexible PDMS thin films. We laminated the two AgNWs/PDMS films together, face-to-face, with another PDMS as dielectric layer, to obtain the capacitive strain sensor, and then study the influence of micro-nano structure on the sensor sensitivity. And the sensitivity of micro-structured AgNWs/PDMS composite sensor was about 1.0 kPa-1, while the sensitivity of flat structured sensor was about 0.6 kPa-1. Research has shown that micro-nano structured electrode can effectively improve the sensitivity of the device.
AB - The sandwich structure flexible capacitive pressure sensor was designed. The sensor adopted polydimethylsiloxane (PDMS) as flexible substrate, silver nanowires as the electrode material, and PDMS as dielectric layer, in addition, the substrate was made by two kinds of structures, the obscured glass substrate with micro-nano structured surface and the smooth glass substrate without micro-nano structured surface, as effective moulds for construction of flexible PDMS thin films. We laminated the two AgNWs/PDMS films together, face-to-face, with another PDMS as dielectric layer, to obtain the capacitive strain sensor, and then study the influence of micro-nano structure on the sensor sensitivity. And the sensitivity of micro-structured AgNWs/PDMS composite sensor was about 1.0 kPa-1, while the sensitivity of flat structured sensor was about 0.6 kPa-1. Research has shown that micro-nano structured electrode can effectively improve the sensitivity of the device.
KW - Flexible pressure sensor
KW - Micro-nano structure
KW - Polydimethylsiloxane (PDMS)
KW - Silver nanowires
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U2 - 10.3969/j.issn.1004-1699.2017.03.001
DO - 10.3969/j.issn.1004-1699.2017.03.001
M3 - Article
AN - SCOPUS:85020835151
SN - 1004-1699
VL - 30
SP - 337
EP - 340
JO - Chinese Journal of Sensors and Actuators
JF - Chinese Journal of Sensors and Actuators
IS - 3
ER -